東京大学工学系研究科電気系工学専攻　中野・種村研究室

MOVPE

MOVPE(As, P)-Planetary

MOVPE(Nitrides)

Atomic Force Microscope

Photo Luminescence

Micro-PL

XRD(Panalytical)

XRD(Brucker)

FT-IR

Ellipsometer

EB Writer

Mask Aligner

Spin Coater

Confocal Microscope

Optical Microscope

DEKTAK Surface Profiler

ICP Dry Etcher

EB Evaporator (ULVAC)

EB Evaporator (ANELVA)

Sputter (ULVAC)

Sputter (ANELVA)

Quick Au Coater

Anneal Chamber

polisher

Water Purifier

Cleaving Stage

Scriber

Die Bonder

Wire Bonders

Scanning Electron Microscope

Automated Fiber Alignment System

Device Measurement Table 1

Device Measurement Table 2

Device Measurement Table 3

Semiconductor Parameter Analyzer

Network Experoment