€έυ (III-V crystal growth)
MOVPE
MOVPE(As, P)-Planetary
MOVPE(Nitrides)
Atomic Force Microscope
Photo Luminescence
Micro-PL
XRD(Panalytical)
XRD(Brucker)
FT-IR
Ellipsometer
€έυ (Semiconductor Process)
EB Writer
Mask Aligner
Spin Coater
Confocal Microscope
Optical Microscope
DEKTAK Surface Profiler
ICP Dry Etcher
EB Evaporator (ULVAC)
EB Evaporator (ANELVA)
Sputter (ULVAC)
Sputter (ANELVA)
Quick Au Coater
Anneal Chamber
polisher
Water Purifier
Cleaving Stage
Scriber
Die Bonder
Wire Bonders
€έυ (Device Measurement and Network Experiment)
Scanning Electron Microscope
Automated Fiber Alignment System
Device Measurement Table 1
Device Measurement Table 2
Device Measurement Table 3
Semiconductor Parameter Analyzer
Network Experoment